Ceramic Targets for Physical Vapor Deposition

OXOLUTIA is able to produce ceramic targets for physical vapor deposition like magnetron sputtering or pulsed laser deposition (PLD). A wide range of materials can be produced:

• YBCO
• Y₂O₃BaZrO₃
• BaHfO₃
• CeO₂
• YBa₂Cu₃O7-x
• YBCO + BaZrO₃
• YBCO + BaHfO₃
• YBaCuO + Y₂O₃
• YBaCO + Ba₂Y(Nb,Ta)O₆
• GdBa₂Cu₃O_7-x
• GBCO+ BaHfO₃
• GBCO + BaZrO₃
• GBCO + BaHfO₃
• GBCO + Ba₂Gd(Nb,Ta)O₆
• BaZrO₃
• Ba(Zr,Y)O₃
• BaTiO₃
• CeO₂
• (La,Sr)CoO₃
• LaMnO₃
• Yb₂Cu₂O₅
• Lu₂Cu₂O₅
• Tb₂Cu₂O₅
• Ho₂Cu₂O₅
• Cu₂O, ZnO
• (Al,Zn)O_2+x
• Sr₂FeMoO₆

Different shapes and sizes are available. Interestingly, we can produces composite targets, i.e., targets with two different phases. Special compositions and doping levels are also available upon request.